Unsupervised deep learning for limited-angle STEM-EDX tomography: application to 3D chemical analysis of phase-change memory devices

literature · npj Computational Materials · 2026-09-18

Daniel Del Pozo Bueno, Serge Brosset, T. Monniez, Gabriele Navarro

Open the source · doi:10.1038/s41524-026-02325-1 · gold · 0 citations

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• Condensed Matter Physics field
• research level
• semiconductors topic

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