Modeling, Analysis, Scheduling, and Control of Cluster Tools in Semiconductor Fabrication

Nai Qi Wu, Mengchu Zhou, Feng Chu, Saïd mammar

Open source

DOI: 10.1002/9781119036821.ch8
Published: 2015-04-03
Container: Contemporary Issues in Systems Science and Engineering
Publisher: Wiley
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1002/9781119036821.ch8,
  title = {Modeling, Analysis, Scheduling, and Control of Cluster Tools in Semiconductor Fabrication},
  author = {Nai Qi Wu and Mengchu Zhou and Feng Chu and Saïd mammar},
  year = {2015},
  journal = {Contemporary Issues in Systems Science and Engineering},
  doi = {10.1002/9781119036821.ch8},
  url = {https://doi.org/10.1002/9781119036821.ch8}
}

RIS

TY  - JOUR
TI  - Modeling, Analysis, Scheduling, and Control of Cluster Tools in Semiconductor Fabrication
AU  - Nai Qi Wu
AU  - Mengchu Zhou
AU  - Feng Chu
AU  - Saïd mammar
PY  - 2015
JO  - Contemporary Issues in Systems Science and Engineering
DO  - 10.1002/9781119036821.ch8
UR  - https://doi.org/10.1002/9781119036821.ch8
ER  -

APA

Wu, N. Q., Zhou, M., Chu, F., & mammar, S. (2015). Modeling, Analysis, Scheduling, and Control of Cluster Tools in Semiconductor Fabrication. Contemporary Issues in Systems Science and Engineering. https://doi.org/10.1002/9781119036821.ch8

Source records

crossref · retrieved 2026-11-10T07:14:15.365Z