Electrochemical Solubility Switching Enables Lateral Etching Toward Sub‐20 nm Nanopatterning
- DOI
- 10.1002/adma.75271
- Published
- 2026-10-05
- Container
- Advanced Materials
- Publisher
- Wiley
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1002/adma.75271,
title = {Electrochemical Solubility Switching Enables Lateral Etching Toward Sub‐20 nm Nanopatterning},
author = {Rui‐An Liu and Jiale He and Jiaheng Gao and Xue‐Song Liu and Baige Yang and Weiran Zhang and Sean Xiao‐An Zhang and Yu‐Mo Zhang},
year = {2026},
journal = {Advanced Materials},
doi = {10.1002/adma.75271},
url = {https://doi.org/10.1002/adma.75271}
}RIS
TY - JOUR TI - Electrochemical Solubility Switching Enables Lateral Etching Toward Sub‐20 nm Nanopatterning AU - Rui‐An Liu AU - Jiale He AU - Jiaheng Gao AU - Xue‐Song Liu AU - Baige Yang AU - Weiran Zhang AU - Sean Xiao‐An Zhang AU - Yu‐Mo Zhang PY - 2026 JO - Advanced Materials DO - 10.1002/adma.75271 UR - https://doi.org/10.1002/adma.75271 ER -
APA
Liu, R., He, J., Gao, J., Liu, X., Yang, B., Zhang, W., Zhang, S. X., & Zhang, Y. (2026). Electrochemical Solubility Switching Enables Lateral Etching Toward Sub‐20 nm Nanopatterning. Advanced Materials. https://doi.org/10.1002/adma.75271
Source records
- crossref · retrieved 2026-11-10T06:39:16.705Z