Atomically Precise Ti–Zr Heterometallic Oxo Clusters for High‐Sensitivity and High‐Resolution Single‐Component Extreme Ultraviolet Photoresists
- DOI
- 10.1002/chem.71458
- Published
- 2026-07-22
- Container
- Chemistry – A European Journal
- Publisher
- Wiley
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1002/chem.71458,
title = {Atomically Precise Ti–Zr Heterometallic Oxo Clusters for High‐Sensitivity and High‐Resolution Single‐Component Extreme Ultraviolet Photoresists},
author = {Lingfeng Zheng and Xinyan Huang and Riyao Cong and Chengyuan Lv and Hongxiang Guo and Xiaofeng Gong and Zirui Huang and Danhong Zhou and Jun Zhao and Pengzhong Chen and Jianjun Du and Jiangli Fan and Xiaojun Peng},
year = {2026},
journal = {Chemistry – A European Journal},
doi = {10.1002/chem.71458},
url = {https://doi.org/10.1002/chem.71458}
}RIS
TY - JOUR TI - Atomically Precise Ti–Zr Heterometallic Oxo Clusters for High‐Sensitivity and High‐Resolution Single‐Component Extreme Ultraviolet Photoresists AU - Lingfeng Zheng AU - Xinyan Huang AU - Riyao Cong AU - Chengyuan Lv AU - Hongxiang Guo AU - Xiaofeng Gong AU - Zirui Huang AU - Danhong Zhou AU - Jun Zhao AU - Pengzhong Chen AU - Jianjun Du AU - Jiangli Fan AU - Xiaojun Peng PY - 2026 JO - Chemistry – A European Journal DO - 10.1002/chem.71458 UR - https://doi.org/10.1002/chem.71458 ER -
APA
Zheng, L., Huang, X., Cong, R., Lv, C., Guo, H., Gong, X., Huang, Z., Zhou, D., Zhao, J., Chen, P., Du, J., Fan, J., & Peng, X. (2026). Atomically Precise Ti–Zr Heterometallic Oxo Clusters for High‐Sensitivity and High‐Resolution Single‐Component Extreme Ultraviolet Photoresists. Chemistry – A European Journal. https://doi.org/10.1002/chem.71458
Source records
- crossref · retrieved 2026-09-25T15:17:19.915Z