Preventing Plasma‐Induced Resist Hardening in Molybdenum Disulfide Transistors via Sacrificial Metal Mask Lithography

Dahyeon Kim, Yanfeng Zhao, Sungyeon Kim, Seungchan Lee, Sangmin Eom, Tae Yeon Kim, Hyun Seok Lee, Joonki Suh, Byungjo Kim, Myungsoo Kim

Open source

DOI
10.1002/smll.75023
Published
2026-08-11
Container
Small
Publisher
Wiley
Open access
unknown

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BibTeX

@article{allodium:10.1002/smll.75023,
  title = {Preventing Plasma‐Induced Resist Hardening in Molybdenum Disulfide Transistors via Sacrificial Metal Mask Lithography},
  author = {Dahyeon Kim and Yanfeng Zhao and Sungyeon Kim and Seungchan Lee and Sangmin Eom and Tae Yeon Kim and Hyun Seok Lee and Joonki Suh and Byungjo Kim and Myungsoo Kim},
  year = {2026},
  journal = {Small},
  doi = {10.1002/smll.75023},
  url = {https://doi.org/10.1002/smll.75023}
}

RIS

TY  - JOUR
TI  - Preventing Plasma‐Induced Resist Hardening in Molybdenum Disulfide Transistors via Sacrificial Metal Mask Lithography
AU  - Dahyeon Kim
AU  - Yanfeng Zhao
AU  - Sungyeon Kim
AU  - Seungchan Lee
AU  - Sangmin Eom
AU  - Tae Yeon Kim
AU  - Hyun Seok Lee
AU  - Joonki Suh
AU  - Byungjo Kim
AU  - Myungsoo Kim
PY  - 2026
JO  - Small
DO  - 10.1002/smll.75023
UR  - https://doi.org/10.1002/smll.75023
ER  - 

APA

Kim, D., Zhao, Y., Kim, S., Lee, S., Eom, S., Kim, T. Y., Lee, H. S., Suh, J., Kim, B., & Kim, M. (2026). Preventing Plasma‐Induced Resist Hardening in Molybdenum Disulfide Transistors via Sacrificial Metal Mask Lithography. Small. https://doi.org/10.1002/smll.75023

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