Recent advances in polymeric chemically amplified positive resists: Materials and design strategies.

Zhou L, Li H, Zhang J, Xin H

DOI: 10.1002/smo2.70077
Published: 2026 Jul 28
Container: Smart molecules : open access
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.1002/smo2.70077,
  title = {Recent advances in polymeric chemically amplified positive resists: Materials and design strategies.},
  author = {Zhou L and Li H and Zhang J and Xin H},
  year = {2026},
  journal = {Smart molecules : open access},
  doi = {10.1002/smo2.70077},
  url = {https://doi.org/10.1002/smo2.70077}
}

RIS

TY  - JOUR
TI  - Recent advances in polymeric chemically amplified positive resists: Materials and design strategies.
AU  - Zhou L
AU  - Li H
AU  - Zhang J
AU  - Xin H
PY  - 2026
JO  - Smart molecules : open access
DO  - 10.1002/smo2.70077
UR  - https://doi.org/10.1002/smo2.70077
ER  -

APA

L, Z., H, L., J, Z., & H, X. (2026). Recent advances in polymeric chemically amplified positive resists: Materials and design strategies.. Smart molecules : open access. https://doi.org/10.1002/smo2.70077

Source records

pubmed · retrieved 2026-09-25T09:18:33.785Z