Interfaces in Atomic Layer Deposited Films: Opportunities and Challenges

Syed Jazib Abbas Zaidi, Jae Chan Park, Ji Won Han, Ji Hyeon Choi, Muhammad Aanish Ali, Muhammad Abdul Basit, Tae Joo Park

Open source

DOI: 10.1002/smsc.202300060
Published: 2023-09-24
Container: Small Science
Publisher: Wiley
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1002/smsc.202300060,
  title = {Interfaces in Atomic Layer Deposited Films: Opportunities and Challenges},
  author = {Syed Jazib Abbas Zaidi and Jae Chan Park and Ji Won Han and Ji Hyeon Choi and Muhammad Aanish Ali and Muhammad Abdul Basit and Tae Joo Park},
  year = {2023},
  journal = {Small Science},
  doi = {10.1002/smsc.202300060},
  url = {https://doi.org/10.1002/smsc.202300060}
}

RIS

TY  - JOUR
TI  - Interfaces in Atomic Layer Deposited Films: Opportunities and Challenges
AU  - Syed Jazib Abbas Zaidi
AU  - Jae Chan Park
AU  - Ji Won Han
AU  - Ji Hyeon Choi
AU  - Muhammad Aanish Ali
AU  - Muhammad Abdul Basit
AU  - Tae Joo Park
PY  - 2023
JO  - Small Science
DO  - 10.1002/smsc.202300060
UR  - https://doi.org/10.1002/smsc.202300060
ER  -

APA

Zaidi, S. J. A., Park, J. C., Han, J. W., Choi, J. H., Ali, M. A., Basit, M. A., & Park, T. J. (2023). Interfaces in Atomic Layer Deposited Films: Opportunities and Challenges. Small Science. https://doi.org/10.1002/smsc.202300060

Source records

crossref · retrieved 2026-09-25T18:26:09.397Z