Growth of Highly‐Ordered‐Crystalline Indium‐Gallium‐Oxide Thin‐Film via Plasma‐Enhanced ALD for High Performance Top‐Gate Field‐Effect Transistors

Min Jae Kim, Seon Woong Bang, Jae Seok Hur, Seong Hun Yoon, Cheol Hee Choi, Sang Won Chung, Jeong Eun Oh, Yena Kim, Bang Ju Park, Jeonga Lee, Hoichang Yang, Daewon Ha, Min Hee Cho, Jae Kyeong Jeong

Open source

DOI
10.1002/smtd.202402070
Published
2024-12-30
Container
Small Methods
Publisher
Wiley
Open access
unknown

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BibTeX

@article{allodium:10.1002/smtd.202402070,
  title = {Growth of Highly‐Ordered‐Crystalline Indium‐Gallium‐Oxide Thin‐Film via Plasma‐Enhanced ALD for High Performance Top‐Gate Field‐Effect Transistors},
  author = {Min Jae Kim and Seon Woong Bang and Jae Seok Hur and Seong Hun Yoon and Cheol Hee Choi and Sang Won Chung and Jeong Eun Oh and Yena Kim and Bang Ju Park and Jeonga Lee and Hoichang Yang and Daewon Ha and Min Hee Cho and Jae Kyeong Jeong},
  year = {2024},
  journal = {Small Methods},
  doi = {10.1002/smtd.202402070},
  url = {https://doi.org/10.1002/smtd.202402070}
}

RIS

TY  - JOUR
TI  - Growth of Highly‐Ordered‐Crystalline Indium‐Gallium‐Oxide Thin‐Film via Plasma‐Enhanced ALD for High Performance Top‐Gate Field‐Effect Transistors
AU  - Min Jae Kim
AU  - Seon Woong Bang
AU  - Jae Seok Hur
AU  - Seong Hun Yoon
AU  - Cheol Hee Choi
AU  - Sang Won Chung
AU  - Jeong Eun Oh
AU  - Yena Kim
AU  - Bang Ju Park
AU  - Jeonga Lee
AU  - Hoichang Yang
AU  - Daewon Ha
AU  - Min Hee Cho
AU  - Jae Kyeong Jeong
PY  - 2024
JO  - Small Methods
DO  - 10.1002/smtd.202402070
UR  - https://doi.org/10.1002/smtd.202402070
ER  - 

APA

Kim, M. J., Bang, S. W., Hur, J. S., Yoon, S. H., Choi, C. H., Chung, S. W., Oh, J. E., Kim, Y., Park, B. J., Lee, J., Yang, H., Ha, D., Cho, M. H., & Jeong, J. K. (2024). Growth of Highly‐Ordered‐Crystalline Indium‐Gallium‐Oxide Thin‐Film via Plasma‐Enhanced ALD for High Performance Top‐Gate Field‐Effect Transistors. Small Methods. https://doi.org/10.1002/smtd.202402070

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