Nanosecond, Nanometer Movies of MEMS/NEMS Dynamics in a Standard SEM Using Time-Tagged Secondary Electrons.

Rehmann J, Schalast C, Kunze K, Rhensius J, Acremann Y

DOI: 10.1002/smtd.71029
Published: 2026 Sep 9
Container: Small methods
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1002/smtd.71029,
  title = {Nanosecond, Nanometer Movies of MEMS/NEMS Dynamics in a Standard SEM Using Time-Tagged Secondary Electrons.},
  author = {Rehmann J and Schalast C and Kunze K and Rhensius J and Acremann Y},
  year = {2026},
  journal = {Small methods},
  doi = {10.1002/smtd.71029},
  url = {https://doi.org/10.1002/smtd.71029}
}

RIS

TY  - JOUR
TI  - Nanosecond, Nanometer Movies of MEMS/NEMS Dynamics in a Standard SEM Using Time-Tagged Secondary Electrons.
AU  - Rehmann J
AU  - Schalast C
AU  - Kunze K
AU  - Rhensius J
AU  - Acremann Y
PY  - 2026
JO  - Small methods
DO  - 10.1002/smtd.71029
UR  - https://doi.org/10.1002/smtd.71029
ER  -

APA

J, R., C, S., K, K., J, R., & Y, A. (2026). Nanosecond, Nanometer Movies of MEMS/NEMS Dynamics in a Standard SEM Using Time-Tagged Secondary Electrons.. Small methods. https://doi.org/10.1002/smtd.71029

Source records

pubmed · retrieved 2026-09-25T08:25:55.144Z