Analysis of E-Beam Microlithography and SEM Imaging Distortions
- DOI
- 10.1007/978-3-319-06986-9_33
- Published
- 2014-09-08
- Container
- Conference Proceedings of the Society for Experimental Mechanics Series
- Publisher
- Springer International Publishing
- Open access
- unknown
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uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1007/978-3-319-06986-9_33,
title = {Analysis of E-Beam Microlithography and SEM Imaging Distortions},
author = {A. Guery and F. Latourte and F. Hild and S. Roux},
year = {2014},
journal = {Conference Proceedings of the Society for Experimental Mechanics Series},
doi = {10.1007/978-3-319-06986-9_33},
url = {https://doi.org/10.1007/978-3-319-06986-9_33}
}RIS
TY - JOUR TI - Analysis of E-Beam Microlithography and SEM Imaging Distortions AU - A. Guery AU - F. Latourte AU - F. Hild AU - S. Roux PY - 2014 JO - Conference Proceedings of the Society for Experimental Mechanics Series DO - 10.1007/978-3-319-06986-9_33 UR - https://doi.org/10.1007/978-3-319-06986-9_33 ER -
APA
Guery, A., Latourte, F., Hild, F., & Roux, S. (2014). Analysis of E-Beam Microlithography and SEM Imaging Distortions. Conference Proceedings of the Society for Experimental Mechanics Series. https://doi.org/10.1007/978-3-319-06986-9_33
Source records
- crossref · retrieved 2026-09-25T03:32:08.440Z