InP-based micromachined Mach-Zehnder interferometer stress sensors

C. Seassal, J. L. Leclercq, G. Fierling, X. Letartre, M. Gendry, P. Viktorovitch, Y. Bertic, A. Trouillet, A. Cachard, P. Benech, J. P. Lainé, F. Sidoroff

Open source

DOI: 10.1007/s005420050071
Published: 1997-05-16
Container: Microsystem Technologies
Publisher: Springer Science and Business Media LLC
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1007/s005420050071,
  title = {InP-based micromachined Mach-Zehnder interferometer stress sensors},
  author = {C. Seassal and J. L. Leclercq and G. Fierling and X. Letartre and M. Gendry and P. Viktorovitch and Y. Bertic and A. Trouillet and A. Cachard and P. Benech and J. P. Lainé and F. Sidoroff},
  year = {1997},
  journal = {Microsystem Technologies},
  doi = {10.1007/s005420050071},
  url = {https://doi.org/10.1007/s005420050071}
}

RIS

TY  - JOUR
TI  - InP-based micromachined Mach-Zehnder interferometer stress sensors
AU  - C. Seassal
AU  - J. L. Leclercq
AU  - G. Fierling
AU  - X. Letartre
AU  - M. Gendry
AU  - P. Viktorovitch
AU  - Y. Bertic
AU  - A. Trouillet
AU  - A. Cachard
AU  - P. Benech
AU  - J. P. Lainé
AU  - F. Sidoroff
PY  - 1997
JO  - Microsystem Technologies
DO  - 10.1007/s005420050071
UR  - https://doi.org/10.1007/s005420050071
ER  -

APA

Seassal, C., Leclercq, J. L., Fierling, G., Letartre, X., Gendry, M., Viktorovitch, P., Bertic, Y., Trouillet, A., Cachard, A., Benech, P., Lainé, J. P., & Sidoroff, F. (1997). InP-based micromachined Mach-Zehnder interferometer stress sensors. Microsystem Technologies. https://doi.org/10.1007/s005420050071

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crossref · retrieved 2026-09-27T04:27:28.428Z