EFSA—a new evaluation method of the depth resolution in depth profiling of multilayer structures

D. Marton, J. László, J. Giber, F.G. Rüdenauer

Open source

DOI: 10.1016/0042-207x(85)90308-2
Published: 1985-12
Container: Vacuum
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0042-207x-85-90308-2,
  title = {EFSA—a new evaluation method of the depth resolution in depth profiling of multilayer structures},
  author = {D. Marton and J. László and J. Giber and F.G. Rüdenauer},
  year = {1985},
  journal = {Vacuum},
  doi = {10.1016/0042-207x(85)90308-2},
  url = {https://doi.org/10.1016/0042-207x(85)90308-2}
}

RIS

TY  - JOUR
TI  - EFSA—a new evaluation method of the depth resolution in depth profiling of multilayer structures
AU  - D. Marton
AU  - J. László
AU  - J. Giber
AU  - F.G. Rüdenauer
PY  - 1985
JO  - Vacuum
DO  - 10.1016/0042-207x(85)90308-2
UR  - https://doi.org/10.1016/0042-207x(85)90308-2
ER  -

APA

Marton, D., László, J., Giber, J., & Rüdenauer, F. (1985). EFSA—a new evaluation method of the depth resolution in depth profiling of multilayer structures. Vacuum. https://doi.org/10.1016/0042-207x(85)90308-2

Source records

crossref · retrieved 2026-09-26T08:16:18.376Z