Tegal introduces new generation of plasma etch systems

Tegal UK

Open source

DOI: 10.1016/0042-207x(86)90023-0
Published: 1986-06
Container: Vacuum
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0042-207x-86-90023-0,
  title = {Tegal introduces new generation of plasma etch systems},
  author = {Tegal UK},
  year = {1986},
  journal = {Vacuum},
  doi = {10.1016/0042-207x(86)90023-0},
  url = {https://doi.org/10.1016/0042-207x(86)90023-0}
}

RIS

TY  - JOUR
TI  - Tegal introduces new generation of plasma etch systems
AU  - Tegal UK
PY  - 1986
JO  - Vacuum
DO  - 10.1016/0042-207x(86)90023-0
UR  - https://doi.org/10.1016/0042-207x(86)90023-0
ER  -

APA

UK, T. (1986). Tegal introduces new generation of plasma etch systems. Vacuum. https://doi.org/10.1016/0042-207x(86)90023-0

Source records

crossref · retrieved 2026-09-27T11:27:17.167Z