RBS, RHEED and THEED studies of SIMOX and SIMNI structures formed by ion beam synthesis

RA Yankov, FF Komarov, SA Petrov

Open source

DOI
10.1016/0042-207x(93)90327-7
Published
1993-11
Container
Vacuum
Publisher
Elsevier BV
Open access
unknown

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BibTeX

@article{allodium:10.1016/0042-207x-93-90327-7,
  title = {RBS, RHEED and THEED studies of SIMOX and SIMNI structures formed by ion beam synthesis},
  author = {RA Yankov and FF Komarov and SA Petrov},
  year = {1993},
  journal = {Vacuum},
  doi = {10.1016/0042-207x(93)90327-7},
  url = {https://doi.org/10.1016/0042-207x(93)90327-7}
}

RIS

TY  - JOUR
TI  - RBS, RHEED and THEED studies of SIMOX and SIMNI structures formed by ion beam synthesis
AU  - RA Yankov
AU  - FF Komarov
AU  - SA Petrov
PY  - 1993
JO  - Vacuum
DO  - 10.1016/0042-207x(93)90327-7
UR  - https://doi.org/10.1016/0042-207x(93)90327-7
ER  - 

APA

Yankov, R., Komarov, F., & Petrov, S. (1993). RBS, RHEED and THEED studies of SIMOX and SIMNI structures formed by ion beam synthesis. Vacuum. https://doi.org/10.1016/0042-207x(93)90327-7

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