Pyrolysis of various organosilazanes used as single precursor of SiN C :H films OMCVD process

F. Maury, Z. Hatim, A. Reynes, R. Morancho

Open source

DOI: 10.1016/0165-2370(89)85006-5
Published: 1989-12
Container: Journal of Analytical and Applied Pyrolysis
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0165-2370-89-85006-5,
  title = {Pyrolysis of various organosilazanes used as single precursor of SiN C :H films OMCVD process},
  author = {F. Maury and Z. Hatim and A. Reynes and R. Morancho},
  year = {1989},
  journal = {Journal of Analytical and Applied Pyrolysis},
  doi = {10.1016/0165-2370(89)85006-5},
  url = {https://doi.org/10.1016/0165-2370(89)85006-5}
}

RIS

TY  - JOUR
TI  - Pyrolysis of various organosilazanes used as single precursor of SiN C :H films OMCVD process
AU  - F. Maury
AU  - Z. Hatim
AU  - A. Reynes
AU  - R. Morancho
PY  - 1989
JO  - Journal of Analytical and Applied Pyrolysis
DO  - 10.1016/0165-2370(89)85006-5
UR  - https://doi.org/10.1016/0165-2370(89)85006-5
ER  -

APA

Maury, F., Hatim, Z., Reynes, A., & Morancho, R. (1989). Pyrolysis of various organosilazanes used as single precursor of SiN C :H films OMCVD process. Journal of Analytical and Applied Pyrolysis. https://doi.org/10.1016/0165-2370(89)85006-5

Source records

crossref · retrieved 2026-09-26T13:35:15.343Z