WePrint 200 — The fast e-beam printer with high throughput

O. Fortagne, P. Hahmann, Ch. Ehrlich

Open source

DOI: 10.1016/0167-9317(94)00077-8
Published: 1995-02
Container: Microelectronic Engineering
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0167-9317-94-00077-8,
  title = {WePrint 200 — The fast e-beam printer with high throughput},
  author = {O. Fortagne and P. Hahmann and Ch. Ehrlich},
  year = {1995},
  journal = {Microelectronic Engineering},
  doi = {10.1016/0167-9317(94)00077-8},
  url = {https://doi.org/10.1016/0167-9317(94)00077-8}
}

RIS

TY  - JOUR
TI  - WePrint 200 — The fast e-beam printer with high throughput
AU  - O. Fortagne
AU  - P. Hahmann
AU  - Ch. Ehrlich
PY  - 1995
JO  - Microelectronic Engineering
DO  - 10.1016/0167-9317(94)00077-8
UR  - https://doi.org/10.1016/0167-9317(94)00077-8
ER  -

APA

Fortagne, O., Hahmann, P., & Ehrlich, C. (1995). WePrint 200 — The fast e-beam printer with high throughput. Microelectronic Engineering. https://doi.org/10.1016/0167-9317(94)00077-8

Source records

crossref · retrieved 2026-09-27T07:07:00.147Z