Various advanced capabilities of the RBS setup at IMEC
- DOI
- 10.1016/0168-583x(92)95586-g
- Published
- 1992-02
- Container
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Publisher
- Elsevier BV
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1016/0168-583x-92-95586-g,
title = {Various advanced capabilities of the RBS setup at IMEC},
author = {B. Brijs and W. De Coster and W. Vandervorst},
year = {1992},
journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
doi = {10.1016/0168-583x(92)95586-g},
url = {https://doi.org/10.1016/0168-583x(92)95586-g}
}RIS
TY - JOUR TI - Various advanced capabilities of the RBS setup at IMEC AU - B. Brijs AU - W. De Coster AU - W. Vandervorst PY - 1992 JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms DO - 10.1016/0168-583x(92)95586-g UR - https://doi.org/10.1016/0168-583x(92)95586-g ER -
APA
Brijs, B., Coster, W. D., & Vandervorst, W. (1992). Various advanced capabilities of the RBS setup at IMEC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. https://doi.org/10.1016/0168-583x(92)95586-g
Source records
- crossref · retrieved 2026-09-26T01:31:45.217Z