The effect of rapid thermal treatments on the formation of shallow junctions by implanting boron and BF2+ ions into (100) silicon through a protecting mask

L. Kaabi, B. Remaki, C. Gontrand, P.F. Lo, B. Balland

Open source

DOI
10.1016/0168-583x(95)01424-1
Published
1996-05
Container
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publisher
Elsevier BV
Open access
unknown

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BibTeX

@article{allodium:10.1016/0168-583x-95-01424-1,
  title = {The effect of rapid thermal treatments on the formation of shallow junctions by implanting boron and BF2+ ions into (100) silicon through a protecting mask},
  author = {L. Kaabi and B. Remaki and C. Gontrand and P.F. Lo and B. Balland},
  year = {1996},
  journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
  doi = {10.1016/0168-583x(95)01424-1},
  url = {https://doi.org/10.1016/0168-583x(95)01424-1}
}

RIS

TY  - JOUR
TI  - The effect of rapid thermal treatments on the formation of shallow junctions by implanting boron and BF2+ ions into (100) silicon through a protecting mask
AU  - L. Kaabi
AU  - B. Remaki
AU  - C. Gontrand
AU  - P.F. Lo
AU  - B. Balland
PY  - 1996
JO  - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DO  - 10.1016/0168-583x(95)01424-1
UR  - https://doi.org/10.1016/0168-583x(95)01424-1
ER  - 

APA

Kaabi, L., Remaki, B., Gontrand, C., Lo, P., & Balland, B. (1996). The effect of rapid thermal treatments on the formation of shallow junctions by implanting boron and BF2+ ions into (100) silicon through a protecting mask. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. https://doi.org/10.1016/0168-583x(95)01424-1

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