A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van De Pol, S. Bouwstra

Open source

DOI: 10.1016/0250-6874(88)87005-7
Published: 1988-10
Container: Sensors and Actuators
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0250-6874-88-87005-7,
  title = {A piezoelectric micropump based on micromachining of silicon},
  author = {H.T.G. van Lintel and F.C.M. van De Pol and S. Bouwstra},
  year = {1988},
  journal = {Sensors and Actuators},
  doi = {10.1016/0250-6874(88)87005-7},
  url = {https://doi.org/10.1016/0250-6874(88)87005-7}
}

RIS

TY  - JOUR
TI  - A piezoelectric micropump based on micromachining of silicon
AU  - H.T.G. van Lintel
AU  - F.C.M. van De Pol
AU  - S. Bouwstra
PY  - 1988
JO  - Sensors and Actuators
DO  - 10.1016/0250-6874(88)87005-7
UR  - https://doi.org/10.1016/0250-6874(88)87005-7
ER  -

APA

Lintel, H. V., Pol, F. V. D., & Bouwstra, S. (1988). A piezoelectric micropump based on micromachining of silicon. Sensors and Actuators. https://doi.org/10.1016/0250-6874(88)87005-7

Source records

crossref · retrieved 2026-09-26T09:43:17.334Z