Doppler-broadened Hα line shapes in A dc low-pressure discharge for TiN deposition

G. Sultan, G. Baravian, M. Gantois, G. Henrion, H. Michel, A. Ricard

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DOI: 10.1016/0301-0104(88)87051-4
Published: 1988-07
Container: Chemical Physics
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0301-0104-88-87051-4,
  title = {Doppler-broadened Hα line shapes in A dc low-pressure discharge for TiN deposition},
  author = {G. Sultan and G. Baravian and M. Gantois and G. Henrion and H. Michel and A. Ricard},
  year = {1988},
  journal = {Chemical Physics},
  doi = {10.1016/0301-0104(88)87051-4},
  url = {https://doi.org/10.1016/0301-0104(88)87051-4}
}

RIS

TY  - JOUR
TI  - Doppler-broadened Hα line shapes in A dc low-pressure discharge for TiN deposition
AU  - G. Sultan
AU  - G. Baravian
AU  - M. Gantois
AU  - G. Henrion
AU  - H. Michel
AU  - A. Ricard
PY  - 1988
JO  - Chemical Physics
DO  - 10.1016/0301-0104(88)87051-4
UR  - https://doi.org/10.1016/0301-0104(88)87051-4
ER  -

APA

Sultan, G., Baravian, G., Gantois, M., Henrion, G., Michel, H., & Ricard, A. (1988). Doppler-broadened Hα line shapes in A dc low-pressure discharge for TiN deposition. Chemical Physics. https://doi.org/10.1016/0301-0104(88)87051-4

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crossref · retrieved 2026-11-09T19:10:05.395Z