The possibilities of glow discharge cathode sputtering for laser atomic-fluorescence analysis of microelectronics materials
- DOI
- 10.1016/0584-8547(91)80052-5
- Published
- 1991-01
- Container
- Spectrochimica Acta Part B: Atomic Spectroscopy
- Publisher
- Elsevier BV
- Open access
- unknown
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uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1016/0584-8547-91-80052-5,
title = {The possibilities of glow discharge cathode sputtering for laser atomic-fluorescence analysis of microelectronics materials},
author = {S. Grazhulene and V. Khvostikov and M. Sorokin},
year = {1991},
journal = {Spectrochimica Acta Part B: Atomic Spectroscopy},
doi = {10.1016/0584-8547(91)80052-5},
url = {https://doi.org/10.1016/0584-8547(91)80052-5}
}RIS
TY - JOUR TI - The possibilities of glow discharge cathode sputtering for laser atomic-fluorescence analysis of microelectronics materials AU - S. Grazhulene AU - V. Khvostikov AU - M. Sorokin PY - 1991 JO - Spectrochimica Acta Part B: Atomic Spectroscopy DO - 10.1016/0584-8547(91)80052-5 UR - https://doi.org/10.1016/0584-8547(91)80052-5 ER -
APA
Grazhulene, S., Khvostikov, V., & Sorokin, M. (1991). The possibilities of glow discharge cathode sputtering for laser atomic-fluorescence analysis of microelectronics materials. Spectrochimica Acta Part B: Atomic Spectroscopy. https://doi.org/10.1016/0584-8547(91)80052-5
Source records
- crossref · retrieved 2026-11-10T14:36:29.703Z