Process alternatives and scaling limits for high-density silicon tactile imagers

K. Suzuki, K. Najafi, K.D. Wise

Open source

DOI: 10.1016/0924-4247(90)87059-r
Published: 1990-04
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-90-87059-r,
  title = {Process alternatives and scaling limits for high-density silicon tactile imagers},
  author = {K. Suzuki and K. Najafi and K.D. Wise},
  year = {1990},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(90)87059-r},
  url = {https://doi.org/10.1016/0924-4247(90)87059-r}
}

RIS

TY  - JOUR
TI  - Process alternatives and scaling limits for high-density silicon tactile imagers
AU  - K. Suzuki
AU  - K. Najafi
AU  - K.D. Wise
PY  - 1990
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(90)87059-r
UR  - https://doi.org/10.1016/0924-4247(90)87059-r
ER  -

APA

Suzuki, K., Najafi, K., & Wise, K. (1990). Process alternatives and scaling limits for high-density silicon tactile imagers. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(90)87059-r

Source records

crossref · retrieved 2026-09-26T17:18:46.571Z