Compatibility of zinc oxide with silicon IC processing

M.J. Vellekoop, C.C.O. Visser, P.M. Sarro, A. Venema

Open source

DOI: 10.1016/0924-4247(90)87083-u
Published: 1990-04
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-90-87083-u,
  title = {Compatibility of zinc oxide with silicon IC processing},
  author = {M.J. Vellekoop and C.C.O. Visser and P.M. Sarro and A. Venema},
  year = {1990},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(90)87083-u},
  url = {https://doi.org/10.1016/0924-4247(90)87083-u}
}

RIS

TY  - JOUR
TI  - Compatibility of zinc oxide with silicon IC processing
AU  - M.J. Vellekoop
AU  - C.C.O. Visser
AU  - P.M. Sarro
AU  - A. Venema
PY  - 1990
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(90)87083-u
UR  - https://doi.org/10.1016/0924-4247(90)87083-u
ER  -

APA

Vellekoop, M., Visser, C., Sarro, P., & Venema, A. (1990). Compatibility of zinc oxide with silicon IC processing. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(90)87083-u

Source records

crossref · retrieved 2026-09-25T21:45:48.923Z