ASEP: a CAD program for silicon anisotropic etching

Rudolf A. Buser, Nicolaas F. de Rooij

Open source

DOI: 10.1016/0924-4247(91)80009-e
Published: 1991-06
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-91-80009-e,
  title = {ASEP: a CAD program for silicon anisotropic etching},
  author = {Rudolf A. Buser and Nicolaas F. de Rooij},
  year = {1991},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(91)80009-e},
  url = {https://doi.org/10.1016/0924-4247(91)80009-e}
}

RIS

TY  - JOUR
TI  - ASEP: a CAD program for silicon anisotropic etching
AU  - Rudolf A. Buser
AU  - Nicolaas F. de Rooij
PY  - 1991
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(91)80009-e
UR  - https://doi.org/10.1016/0924-4247(91)80009-e
ER  -

APA

Buser, R. A., & Rooij, N. F. D. (1991). ASEP: a CAD program for silicon anisotropic etching. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(91)80009-e

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crossref · retrieved 2026-09-24T23:48:04.603Z