Bipolar effects in the fabrication of silicon membranes by the anodic etch stop

M.K. Andrews, G.C. Turner

Open source

DOI: 10.1016/0924-4247(91)80031-j
Published: 1991-09
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-91-80031-j,
  title = {Bipolar effects in the fabrication of silicon membranes by the anodic etch stop},
  author = {M.K. Andrews and G.C. Turner},
  year = {1991},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(91)80031-j},
  url = {https://doi.org/10.1016/0924-4247(91)80031-j}
}

RIS

TY  - JOUR
TI  - Bipolar effects in the fabrication of silicon membranes by the anodic etch stop
AU  - M.K. Andrews
AU  - G.C. Turner
PY  - 1991
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(91)80031-j
UR  - https://doi.org/10.1016/0924-4247(91)80031-j
ER  -

APA

Andrews, M., & Turner, G. (1991). Bipolar effects in the fabrication of silicon membranes by the anodic etch stop. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(91)80031-j

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crossref · retrieved 2026-09-27T00:41:20.233Z