Fabrication of capacitive acceleration sensors by the LIGA technique

C. Burbaum, J. Mohr, P. Bley, W. Ehrfeld

Open source

DOI: 10.1016/0924-4247(91)87051-4
Published: 1991-05
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-91-87051-4,
  title = {Fabrication of capacitive acceleration sensors by the LIGA technique},
  author = {C. Burbaum and J. Mohr and P. Bley and W. Ehrfeld},
  year = {1991},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(91)87051-4},
  url = {https://doi.org/10.1016/0924-4247(91)87051-4}
}

RIS

TY  - JOUR
TI  - Fabrication of capacitive acceleration sensors by the LIGA technique
AU  - C. Burbaum
AU  - J. Mohr
AU  - P. Bley
AU  - W. Ehrfeld
PY  - 1991
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(91)87051-4
UR  - https://doi.org/10.1016/0924-4247(91)87051-4
ER  -

APA

Burbaum, C., Mohr, J., Bley, P., & Ehrfeld, W. (1991). Fabrication of capacitive acceleration sensors by the LIGA technique. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(91)87051-4

Source records

crossref · retrieved 2026-09-27T05:03:40.003Z