Fabrication of microchannels by laser machining and anisotropic etching of silicon
- DOI
- 10.1016/0924-4247(92)80002-k
- Published
- 1992-04
- Container
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Open access
- unknown
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uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.1016/0924-4247-92-80002-k,
title = {Fabrication of microchannels by laser machining and anisotropic etching of silicon},
author = {M. Alavi and S. Büttgenbach and A. Schumacher and H.-J. Wagner},
year = {1992},
journal = {Sensors and Actuators A: Physical},
doi = {10.1016/0924-4247(92)80002-k},
url = {https://doi.org/10.1016/0924-4247(92)80002-k}
}RIS
TY - JOUR TI - Fabrication of microchannels by laser machining and anisotropic etching of silicon AU - M. Alavi AU - S. Büttgenbach AU - A. Schumacher AU - H.-J. Wagner PY - 1992 JO - Sensors and Actuators A: Physical DO - 10.1016/0924-4247(92)80002-k UR - https://doi.org/10.1016/0924-4247(92)80002-k ER -
APA
Alavi, M., Büttgenbach, S., Schumacher, A., & Wagner, H. (1992). Fabrication of microchannels by laser machining and anisotropic etching of silicon. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(92)80002-k
Source records
- crossref · retrieved 2026-11-10T13:13:34.279Z