A comparison between micromachined pressure sensors using quartz or silicon vibrating beams
- DOI
- 10.1016/0924-4247(92)85003-k
- Published
- 1992-09
- Container
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1016/0924-4247-92-85003-k,
title = {A comparison between micromachined pressure sensors using quartz or silicon vibrating beams},
author = {M. Dufour and M.T. Delaye and F. Michel and J.S. Danel and B. Diem and G. Delapierre},
year = {1992},
journal = {Sensors and Actuators A: Physical},
doi = {10.1016/0924-4247(92)85003-k},
url = {https://doi.org/10.1016/0924-4247(92)85003-k}
}RIS
TY - JOUR TI - A comparison between micromachined pressure sensors using quartz or silicon vibrating beams AU - M. Dufour AU - M.T. Delaye AU - F. Michel AU - J.S. Danel AU - B. Diem AU - G. Delapierre PY - 1992 JO - Sensors and Actuators A: Physical DO - 10.1016/0924-4247(92)85003-k UR - https://doi.org/10.1016/0924-4247(92)85003-k ER -
APA
Dufour, M., Delaye, M., Michel, F., Danel, J., Diem, B., & Delapierre, G. (1992). A comparison between micromachined pressure sensors using quartz or silicon vibrating beams. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(92)85003-k
Source records
- crossref · retrieved 2026-09-26T03:06:37.808Z