Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators

J. Vollmer, H. Hein, W. Menz, F. Walter

Open source

DOI: 10.1016/0924-4247(93)00708-c
Published: 1994-05
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-93-00708-c,
  title = {Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators},
  author = {J. Vollmer and H. Hein and W. Menz and F. Walter},
  year = {1994},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(93)00708-c},
  url = {https://doi.org/10.1016/0924-4247(93)00708-c}
}

RIS

TY  - JOUR
TI  - Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators
AU  - J. Vollmer
AU  - H. Hein
AU  - W. Menz
AU  - F. Walter
PY  - 1994
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(93)00708-c
UR  - https://doi.org/10.1016/0924-4247(93)00708-c
ER  -

APA

Vollmer, J., Hein, H., Menz, W., & Walter, F. (1994). Bistable fluidic elements in LIGA technique for flow control in fluidic microactuators. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(93)00708-c

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crossref · retrieved 2026-09-26T16:15:41.122Z