Monolithic microbridges in silicon using laser machining and anisotropic etching

M. Alavi, Th. Fabula, A. Schumacher, H.-J. Wagner

Open source

DOI: 10.1016/0924-4247(93)80112-t
Published: 1993-06
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-93-80112-t,
  title = {Monolithic microbridges in silicon using laser machining and anisotropic etching},
  author = {M. Alavi and Th. Fabula and A. Schumacher and H.-J. Wagner},
  year = {1993},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(93)80112-t},
  url = {https://doi.org/10.1016/0924-4247(93)80112-t}
}

RIS

TY  - JOUR
TI  - Monolithic microbridges in silicon using laser machining and anisotropic etching
AU  - M. Alavi
AU  - Th. Fabula
AU  - A. Schumacher
AU  - H.-J. Wagner
PY  - 1993
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(93)80112-t
UR  - https://doi.org/10.1016/0924-4247(93)80112-t
ER  -

APA

Alavi, M., Fabula, T., Schumacher, A., & Wagner, H. (1993). Monolithic microbridges in silicon using laser machining and anisotropic etching. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(93)80112-t

Source records

crossref · retrieved 2026-11-10T14:50:12.594Z