Integrated circuit fabrication compatible three-mask tungsten process for micromotors and gears

Thomas Zettler

Open source

DOI: 10.1016/0924-4247(94)00799-3
Published: 1994-08
Container: Sensors and Actuators A: Physical
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/0924-4247-94-00799-3,
  title = {Integrated circuit fabrication compatible three-mask tungsten process for micromotors and gears},
  author = {Thomas Zettler},
  year = {1994},
  journal = {Sensors and Actuators A: Physical},
  doi = {10.1016/0924-4247(94)00799-3},
  url = {https://doi.org/10.1016/0924-4247(94)00799-3}
}

RIS

TY  - JOUR
TI  - Integrated circuit fabrication compatible three-mask tungsten process for micromotors and gears
AU  - Thomas Zettler
PY  - 1994
JO  - Sensors and Actuators A: Physical
DO  - 10.1016/0924-4247(94)00799-3
UR  - https://doi.org/10.1016/0924-4247(94)00799-3
ER  -

APA

Zettler, T. (1994). Integrated circuit fabrication compatible three-mask tungsten process for micromotors and gears. Sensors and Actuators A: Physical. https://doi.org/10.1016/0924-4247(94)00799-3

Source records

crossref · retrieved 2026-09-25T13:17:10.038Z