Dielectric properties of hafnium oxide film prepared by HiPIMS at different O2/Ar ratios and their influences on TFT performance

Ming-Jie Zhao, Yao-Tian Wang, Jia-Hao Yan, Hai-Cheng Li, Hua Xu, Dong-Sing Wuu, Wan-Yu Wu, Feng-Min Lai, Shui-Yang Lien, Wen-Zhang Zhu

Open source

DOI
10.1016/j.jsamd.2024.100722
Published
2024-06
Container
Journal of Science: Advanced Materials and Devices
Publisher
Elsevier BV
Open access
unknown

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BibTeX

@article{allodium:10.1016/j.jsamd.2024.100722,
  title = {Dielectric properties of hafnium oxide film prepared by HiPIMS at different O2/Ar ratios and their influences on TFT performance},
  author = {Ming-Jie Zhao and Yao-Tian Wang and Jia-Hao Yan and Hai-Cheng Li and Hua Xu and Dong-Sing Wuu and Wan-Yu Wu and Feng-Min Lai and Shui-Yang Lien and Wen-Zhang Zhu},
  year = {2024},
  journal = {Journal of Science: Advanced Materials and Devices},
  doi = {10.1016/j.jsamd.2024.100722},
  url = {https://doi.org/10.1016/j.jsamd.2024.100722}
}

RIS

TY  - JOUR
TI  - Dielectric properties of hafnium oxide film prepared by HiPIMS at different O2/Ar ratios and their influences on TFT performance
AU  - Ming-Jie Zhao
AU  - Yao-Tian Wang
AU  - Jia-Hao Yan
AU  - Hai-Cheng Li
AU  - Hua Xu
AU  - Dong-Sing Wuu
AU  - Wan-Yu Wu
AU  - Feng-Min Lai
AU  - Shui-Yang Lien
AU  - Wen-Zhang Zhu
PY  - 2024
JO  - Journal of Science: Advanced Materials and Devices
DO  - 10.1016/j.jsamd.2024.100722
UR  - https://doi.org/10.1016/j.jsamd.2024.100722
ER  - 

APA

Zhao, M., Wang, Y., Yan, J., Li, H., Xu, H., Wuu, D., Wu, W., Lai, F., Lien, S., & Zhu, W. (2024). Dielectric properties of hafnium oxide film prepared by HiPIMS at different O2/Ar ratios and their influences on TFT performance. Journal of Science: Advanced Materials and Devices. https://doi.org/10.1016/j.jsamd.2024.100722

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