Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments

S. Necipoglu, S. A. Cebeci, Cagatay Basdogan, Y. E. Has, L. Guvenc

Open source

DOI
10.1016/j.mechatronics.2011.06.004
Published
2011
Container
Mechatronics
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.1016/j.mechatronics.2011.06.004,
  title = {Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments},
  author = {S. Necipoglu and S. A. Cebeci and Cagatay Basdogan and Y. E. Has and L. Guvenc},
  year = {2011},
  journal = {Mechatronics},
  doi = {10.1016/j.mechatronics.2011.06.004},
  url = {https://doi.org/10.1016/j.mechatronics.2011.06.004}
}

RIS

TY  - JOUR
TI  - Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments
AU  - S. Necipoglu
AU  - S. A. Cebeci
AU  - Cagatay Basdogan
AU  - Y. E. Has
AU  - L. Guvenc
PY  - 2011
JO  - Mechatronics
DO  - 10.1016/j.mechatronics.2011.06.004
UR  - https://doi.org/10.1016/j.mechatronics.2011.06.004
ER  - 

APA

Necipoglu, S., Cebeci, S. A., Basdogan, C., Has, Y. E., & Guvenc, L. (2011). Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments. Mechatronics. https://doi.org/10.1016/j.mechatronics.2011.06.004

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