Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments
- DOI
- 10.1016/j.mechatronics.2011.06.004
- Published
- 2011
- Container
- Mechatronics
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1016/j.mechatronics.2011.06.004,
title = {Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments},
author = {S. Necipoglu and S. A. Cebeci and Cagatay Basdogan and Y. E. Has and L. Guvenc},
year = {2011},
journal = {Mechatronics},
doi = {10.1016/j.mechatronics.2011.06.004},
url = {https://doi.org/10.1016/j.mechatronics.2011.06.004}
}RIS
TY - JOUR TI - Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments AU - S. Necipoglu AU - S. A. Cebeci AU - Cagatay Basdogan AU - Y. E. Has AU - L. Guvenc PY - 2011 JO - Mechatronics DO - 10.1016/j.mechatronics.2011.06.004 UR - https://doi.org/10.1016/j.mechatronics.2011.06.004 ER -
APA
Necipoglu, S., Cebeci, S. A., Basdogan, C., Has, Y. E., & Guvenc, L. (2011). Repetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments. Mechatronics. https://doi.org/10.1016/j.mechatronics.2011.06.004
Source records
- hal · retrieved 2026-09-24T17:14:10.116Z