Simulation-driven 3D line roughness reconstruction: A proof-of-concept deep learning framework for SEM metrology.
- DOI
- 10.1016/j.micron.2026.104101
- Published
- 2026 Aug 29
- Container
- Micron (Oxford, England : 1993)
- Publisher
- Not recorded
- Open access
- unknown
Credibility signals
limited evidence Score 43/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
Show all credibility signals
- cautionDOI registered: No matching Crossref record was present in this response.
- cautionDOI resolves: No matching Crossref record was present in this response.
- not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility.
- not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made.
- not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made.
- not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made.
- not scoredROR affiliation: Not checked or no result supplied; no credibility inference made.
- not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredOpen access status: Not checked or no result supplied; no credibility inference made.
- not scoredPublication license: Not checked or no result supplied; no credibility inference made.
- not scoredPublication version: A publication version was supplied but is not scored.
- cautionMetadata completeness: 5 of 6 scored descriptive metadata groups are present; missing fields increase uncertainty.
Cite this work
BibTeX
@article{allodium:10.1016/j.micron.2026.104101,
title = {Simulation-driven 3D line roughness reconstruction: A proof-of-concept deep learning framework for SEM metrology.},
author = {Jung H and Kang H and Park IY and Yun DJ},
year = {2026},
journal = {Micron (Oxford, England : 1993)},
doi = {10.1016/j.micron.2026.104101},
url = {https://doi.org/10.1016/j.micron.2026.104101}
}RIS
TY - JOUR TI - Simulation-driven 3D line roughness reconstruction: A proof-of-concept deep learning framework for SEM metrology. AU - Jung H AU - Kang H AU - Park IY AU - Yun DJ PY - 2026 JO - Micron (Oxford, England : 1993) DO - 10.1016/j.micron.2026.104101 UR - https://doi.org/10.1016/j.micron.2026.104101 ER -
APA
H, J., H, K., IY, P., & DJ, Y. (2026). Simulation-driven 3D line roughness reconstruction: A proof-of-concept deep learning framework for SEM metrology.. Micron (Oxford, England : 1993). https://doi.org/10.1016/j.micron.2026.104101
Source records
- pubmed · retrieved 2026-09-26T03:49:23.407Z