Investigating the degradation mechanisms of moisture on the reliability of integrated low-k stack
- DOI
- 10.1016/j.microrel.2023.115087
- Published
- 2023-11
- Container
- Microelectronics Reliability
- Publisher
- Elsevier BV
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1016/j.microrel.2023.115087,
title = {Investigating the degradation mechanisms of moisture on the reliability of integrated low-k stack},
author = {Léo Mischler and Vivien Cartailler and Grégory Imbert and Geneviève Duchamp and Hélène Frémont},
year = {2023},
journal = {Microelectronics Reliability},
doi = {10.1016/j.microrel.2023.115087},
url = {https://doi.org/10.1016/j.microrel.2023.115087}
}RIS
TY - JOUR TI - Investigating the degradation mechanisms of moisture on the reliability of integrated low-k stack AU - Léo Mischler AU - Vivien Cartailler AU - Grégory Imbert AU - Geneviève Duchamp AU - Hélène Frémont PY - 2023 JO - Microelectronics Reliability DO - 10.1016/j.microrel.2023.115087 UR - https://doi.org/10.1016/j.microrel.2023.115087 ER -
APA
Mischler, L., Cartailler, V., Imbert, G., Duchamp, G., & Frémont, H. (2023). Investigating the degradation mechanisms of moisture on the reliability of integrated low-k stack. Microelectronics Reliability. https://doi.org/10.1016/j.microrel.2023.115087
Source records
- crossref · retrieved 2026-09-26T10:53:58.975Z