Pattern distortion in nanoimprint lithography using UV-curable polymer stamps

Fangfang Li, Marina Fetisova, Mervi Koskinen, Jukka Viheriälä, Tapio Niemi, Petri Karvinen, Markku Kuittinen

Open source

DOI
10.1016/j.mne.2024.100293
Published
2024-12
Container
Micro and Nano Engineering
Publisher
Elsevier BV
Open access
unknown

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BibTeX

@article{allodium:10.1016/j.mne.2024.100293,
  title = {Pattern distortion in nanoimprint lithography using UV-curable polymer stamps},
  author = {Fangfang Li and Marina Fetisova and Mervi Koskinen and Jukka Viheriälä and Tapio Niemi and Petri Karvinen and Markku Kuittinen},
  year = {2024},
  journal = {Micro and Nano Engineering},
  doi = {10.1016/j.mne.2024.100293},
  url = {https://doi.org/10.1016/j.mne.2024.100293}
}

RIS

TY  - JOUR
TI  - Pattern distortion in nanoimprint lithography using UV-curable polymer stamps
AU  - Fangfang Li
AU  - Marina Fetisova
AU  - Mervi Koskinen
AU  - Jukka Viheriälä
AU  - Tapio Niemi
AU  - Petri Karvinen
AU  - Markku Kuittinen
PY  - 2024
JO  - Micro and Nano Engineering
DO  - 10.1016/j.mne.2024.100293
UR  - https://doi.org/10.1016/j.mne.2024.100293
ER  - 

APA

Li, F., Fetisova, M., Koskinen, M., Viheriälä, J., Niemi, T., Karvinen, P., & Kuittinen, M. (2024). Pattern distortion in nanoimprint lithography using UV-curable polymer stamps. Micro and Nano Engineering. https://doi.org/10.1016/j.mne.2024.100293

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