Recent advances in adapting ionic liquid ion sources to focused ion beams technologies
- DOI
- 10.1016/j.mne.2026.100389
- Published
- 09
- Container
- Micro and Nano Engineering
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.1016/j.mne.2026.100389,
title = {Recent advances in adapting ionic liquid ion sources to focused ion beams technologies},
author = {Philippe Berdagué and Philippe Lesot and David Bouville and Cédric Villebasse and Jacques Gierak},
year = {2026},
journal = {Micro and Nano Engineering},
doi = {10.1016/j.mne.2026.100389},
url = {https://doi.org/10.1016/j.mne.2026.100389}
}RIS
TY - JOUR TI - Recent advances in adapting ionic liquid ion sources to focused ion beams technologies AU - Philippe Berdagué AU - Philippe Lesot AU - David Bouville AU - Cédric Villebasse AU - Jacques Gierak PY - 2026 JO - Micro and Nano Engineering DO - 10.1016/j.mne.2026.100389 UR - https://doi.org/10.1016/j.mne.2026.100389 ER -
APA
Berdagué, P., Lesot, P., Bouville, D., Villebasse, C., & Gierak, J. (2026). Recent advances in adapting ionic liquid ion sources to focused ion beams technologies. Micro and Nano Engineering. https://doi.org/10.1016/j.mne.2026.100389