Dielectric oxynitride LaTiO<sub>x</sub>N<sub>y</sub> thin films deposited by reactive radio-frequency sputtering

Ahmed Ziani, Claire Le Paven-Thivet, Didier Fasquelle, Laurent Le Gendre, Ratiba Benzerga, Franck Tessier, François Cheviré, Jean-Claude Carru, Ala Sharaiha

Open source

DOI
10.1016/j.tsf.2011.10.192
Published
2012-05-01
Container
Thin Solid Films
Publisher
Not recorded
Open access
no

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BibTeX

@article{allodium:10.1016/j.tsf.2011.10.192,
  title = {Dielectric oxynitride LaTiO<sub>x</sub>N<sub>y</sub> thin films deposited by reactive radio-frequency sputtering},
  author = {Ahmed Ziani and Claire Le Paven-Thivet and Didier Fasquelle and Laurent Le Gendre and Ratiba Benzerga and Franck Tessier and François Cheviré and Jean-Claude Carru and Ala Sharaiha},
  year = {2012},
  journal = {Thin Solid Films},
  doi = {10.1016/j.tsf.2011.10.192},
  url = {https://doi.org/10.1016/j.tsf.2011.10.192}
}

RIS

TY  - JOUR
TI  - Dielectric oxynitride LaTiO<sub>x</sub>N<sub>y</sub> thin films deposited by reactive radio-frequency sputtering
AU  - Ahmed Ziani
AU  - Claire Le Paven-Thivet
AU  - Didier Fasquelle
AU  - Laurent Le Gendre
AU  - Ratiba Benzerga
AU  - Franck Tessier
AU  - François Cheviré
AU  - Jean-Claude Carru
AU  - Ala Sharaiha
PY  - 2012
JO  - Thin Solid Films
DO  - 10.1016/j.tsf.2011.10.192
UR  - https://doi.org/10.1016/j.tsf.2011.10.192
ER  - 

APA

Ziani, A., Paven-Thivet, C. L., Fasquelle, D., Gendre, L. L., Benzerga, R., Tessier, F., Cheviré, F., Carru, J., & Sharaiha, A. (2012). Dielectric oxynitride LaTiO<sub>x</sub>N<sub>y</sub> thin films deposited by reactive radio-frequency sputtering. Thin Solid Films. https://doi.org/10.1016/j.tsf.2011.10.192

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