A novel frequency tracking method based on improved ESC control method for megasonic cleaning system.

Peng T, Wu Y, Yang L, Wang Q, Kang Y, Long Z, IEEE Member

DOI: 10.1016/j.ultras.2026.108258
Published: 2027 Jan
Container: Ultrasonics
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/j.ultras.2026.108258,
  title = {A novel frequency tracking method based on improved ESC control method for megasonic cleaning system.},
  author = {Peng T and Wu Y and Yang L and Wang Q and Kang Y and Long Z and IEEE Member},
  year = {2027},
  journal = {Ultrasonics},
  doi = {10.1016/j.ultras.2026.108258},
  url = {https://doi.org/10.1016/j.ultras.2026.108258}
}

RIS

TY  - JOUR
TI  - A novel frequency tracking method based on improved ESC control method for megasonic cleaning system.
AU  - Peng T
AU  - Wu Y
AU  - Yang L
AU  - Wang Q
AU  - Kang Y
AU  - Long Z
AU  - IEEE Member
PY  - 2027
JO  - Ultrasonics
DO  - 10.1016/j.ultras.2026.108258
UR  - https://doi.org/10.1016/j.ultras.2026.108258
ER  -

APA

T, P., Y, W., L, Y., Q, W., Y, K., Z, L., & Member, I. (2027). A novel frequency tracking method based on improved ESC control method for megasonic cleaning system.. Ultrasonics. https://doi.org/10.1016/j.ultras.2026.108258

Source records

pubmed · retrieved 2026-09-26T16:17:44.883Z