ALD furnaces offer rapid cooling to cut cycle times

Author unknown

Open source

DOI
10.1016/s0026-0657(99)80629-8
Published
1996-09
Container
Metal Powder Report
Publisher
Auricle Global Society of Education and Research
Open access
unknown

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BibTeX

@article{allodium:10.1016/s0026-0657-99-80629-8,
  title = {ALD furnaces offer rapid cooling to cut cycle times},
  year = {1996},
  journal = {Metal Powder Report},
  doi = {10.1016/s0026-0657(99)80629-8},
  url = {https://doi.org/10.1016/s0026-0657(99)80629-8}
}

RIS

TY  - JOUR
TI  - ALD furnaces offer rapid cooling to cut cycle times
PY  - 1996
JO  - Metal Powder Report
DO  - 10.1016/s0026-0657(99)80629-8
UR  - https://doi.org/10.1016/s0026-0657(99)80629-8
ER  - 

APA

ALD furnaces offer rapid cooling to cut cycle times. (1996). Metal Powder Report. https://doi.org/10.1016/s0026-0657(99)80629-8

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