Amine gradient process for DUV lithography

J.-C Jung, M.-H Jung, G Lee, K.-H Baik

Open source

DOI: 10.1016/s0032-3861(00)00326-8
Published: 2001-01
Container: Polymer
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0032-3861-00-00326-8,
  title = {Amine gradient process for DUV lithography},
  author = {J.-C Jung and M.-H Jung and G Lee and K.-H Baik},
  year = {2001},
  journal = {Polymer},
  doi = {10.1016/s0032-3861(00)00326-8},
  url = {https://doi.org/10.1016/s0032-3861(00)00326-8}
}

RIS

TY  - JOUR
TI  - Amine gradient process for DUV lithography
AU  - J.-C Jung
AU  - M.-H Jung
AU  - G Lee
AU  - K.-H Baik
PY  - 2001
JO  - Polymer
DO  - 10.1016/s0032-3861(00)00326-8
UR  - https://doi.org/10.1016/s0032-3861(00)00326-8
ER  -

APA

Jung, J., Jung, M., Lee, G., & Baik, K. (2001). Amine gradient process for DUV lithography. Polymer. https://doi.org/10.1016/s0032-3861(00)00326-8

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crossref · retrieved 2026-09-26T04:03:22.513Z