Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process.

Eccardt PC, Niederer K

DOI: 10.1016/s0041-624x(99)00085-2
Published: 2000 Mar
Container: Ultrasonics
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0041-624x-99-00085-2,
  title = {Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process.},
  author = {Eccardt PC and Niederer K},
  year = {2000},
  journal = {Ultrasonics},
  doi = {10.1016/s0041-624x(99)00085-2},
  url = {https://doi.org/10.1016/s0041-624x(99)00085-2}
}

RIS

TY  - JOUR
TI  - Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process.
AU  - Eccardt PC
AU  - Niederer K
PY  - 2000
JO  - Ultrasonics
DO  - 10.1016/s0041-624x(99)00085-2
UR  - https://doi.org/10.1016/s0041-624x(99)00085-2
ER  -

APA

PC, E., & K, N. (2000). Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process.. Ultrasonics. https://doi.org/10.1016/s0041-624x(99)00085-2

Source records

pubmed · retrieved 2026-09-25T22:11:46.996Z