Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission
- DOI
- 10.1016/s0167-9317(01)00558-5
- Published
- 2001-09
- Container
- Microelectronic Engineering
- Publisher
- Elsevier BV
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1016/s0167-9317-01-00558-5,
title = {Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission},
author = {W. Barth and T. Debski and N. Abedinov and Tz. Ivanov and H. Heerlein and B. Volland and T. Gotszalk and I.W. Rangelow and K. Torkar and K. Fritzenwallner and P. Grabiec and K. Studzińska and I. Kostic and P. Hudek},
year = {2001},
journal = {Microelectronic Engineering},
doi = {10.1016/s0167-9317(01)00558-5},
url = {https://doi.org/10.1016/s0167-9317(01)00558-5}
}RIS
TY - JOUR TI - Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission AU - W. Barth AU - T. Debski AU - N. Abedinov AU - Tz. Ivanov AU - H. Heerlein AU - B. Volland AU - T. Gotszalk AU - I.W. Rangelow AU - K. Torkar AU - K. Fritzenwallner AU - P. Grabiec AU - K. Studzińska AU - I. Kostic AU - P. Hudek PY - 2001 JO - Microelectronic Engineering DO - 10.1016/s0167-9317(01)00558-5 UR - https://doi.org/10.1016/s0167-9317(01)00558-5 ER -
APA
Barth, W., Debski, T., Abedinov, N., Ivanov, T., Heerlein, H., Volland, B., Gotszalk, T., Rangelow, I., Torkar, K., Fritzenwallner, K., Grabiec, P., Studzińska, K., Kostic, I., & Hudek, P. (2001). Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission. Microelectronic Engineering. https://doi.org/10.1016/s0167-9317(01)00558-5
Source records
- crossref · retrieved 2026-09-26T07:42:20.647Z