An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble

S. Bord, A. Clement, J.C. Lecomte, J.C. Marmeggi

Open source

DOI: 10.1016/s0167-9317(02)00523-3
Published: 2002-07
Container: Microelectronic Engineering
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0167-9317-02-00523-3,
  title = {An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble},
  author = {S. Bord and A. Clement and J.C. Lecomte and J.C. Marmeggi},
  year = {2002},
  journal = {Microelectronic Engineering},
  doi = {10.1016/s0167-9317(02)00523-3},
  url = {https://doi.org/10.1016/s0167-9317(02)00523-3}
}

RIS

TY  - JOUR
TI  - An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble
AU  - S. Bord
AU  - A. Clement
AU  - J.C. Lecomte
AU  - J.C. Marmeggi
PY  - 2002
JO  - Microelectronic Engineering
DO  - 10.1016/s0167-9317(02)00523-3
UR  - https://doi.org/10.1016/s0167-9317(02)00523-3
ER  -

APA

Bord, S., Clement, A., Lecomte, J., & Marmeggi, J. (2002). An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble. Microelectronic Engineering. https://doi.org/10.1016/s0167-9317(02)00523-3

Source records

crossref · retrieved 2026-09-25T21:03:07.805Z