ASET development activities for future lithographic technologies

Shinji Okazaki

Open source

DOI: 10.1016/s0167-9317(02)00591-9
Published: 2002-07
Container: Microelectronic Engineering
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0167-9317-02-00591-9,
  title = {ASET development activities for future lithographic technologies},
  author = {Shinji Okazaki},
  year = {2002},
  journal = {Microelectronic Engineering},
  doi = {10.1016/s0167-9317(02)00591-9},
  url = {https://doi.org/10.1016/s0167-9317(02)00591-9}
}

RIS

TY  - JOUR
TI  - ASET development activities for future lithographic technologies
AU  - Shinji Okazaki
PY  - 2002
JO  - Microelectronic Engineering
DO  - 10.1016/s0167-9317(02)00591-9
UR  - https://doi.org/10.1016/s0167-9317(02)00591-9
ER  -

APA

Okazaki, S. (2002). ASET development activities for future lithographic technologies. Microelectronic Engineering. https://doi.org/10.1016/s0167-9317(02)00591-9

Source records

crossref · retrieved 2026-09-26T22:48:48.505Z