High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications
- DOI
- 10.1016/s0167-9317(98)00078-1
- Published
- 1998-03
- Container
- Microelectronic Engineering
- Publisher
- Elsevier BV
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.1016/s0167-9317-98-00078-1,
title = {High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications},
author = {W. Spiess and S. Funato and Y. Kinoshita and Y. Nozaki and G. Pawlowski},
year = {1998},
journal = {Microelectronic Engineering},
doi = {10.1016/s0167-9317(98)00078-1},
url = {https://doi.org/10.1016/s0167-9317(98)00078-1}
}RIS
TY - JOUR TI - High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications AU - W. Spiess AU - S. Funato AU - Y. Kinoshita AU - Y. Nozaki AU - G. Pawlowski PY - 1998 JO - Microelectronic Engineering DO - 10.1016/s0167-9317(98)00078-1 UR - https://doi.org/10.1016/s0167-9317(98)00078-1 ER -
APA
Spiess, W., Funato, S., Kinoshita, Y., Nozaki, Y., & Pawlowski, G. (1998). High performance positive DUV photoresists AZ® DX 1100P, AZ® DX 1200P. AZ® DX 1300P, AZ® DX 2034P, AZ® DX 2058P for advanced lithographic applications. Microelectronic Engineering. https://doi.org/10.1016/s0167-9317(98)00078-1
Source records
- crossref · retrieved 2026-09-26T23:16:52.896Z