Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

M Koh, S Sawara, T Shinada, T Goto, Y Ando, I Ohdomari

Open source

DOI: 10.1016/s0169-4332(00)00257-9
Published: 2000-08
Container: Applied Surface Science
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0169-4332-00-00257-9,
  title = {Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching},
  author = {M Koh and S Sawara and T Shinada and T Goto and Y Ando and I Ohdomari},
  year = {2000},
  journal = {Applied Surface Science},
  doi = {10.1016/s0169-4332(00)00257-9},
  url = {https://doi.org/10.1016/s0169-4332(00)00257-9}
}

RIS

TY  - JOUR
TI  - Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching
AU  - M Koh
AU  - S Sawara
AU  - T Shinada
AU  - T Goto
AU  - Y Ando
AU  - I Ohdomari
PY  - 2000
JO  - Applied Surface Science
DO  - 10.1016/s0169-4332(00)00257-9
UR  - https://doi.org/10.1016/s0169-4332(00)00257-9
ER  -

APA

Koh, M., Sawara, S., Shinada, T., Goto, T., Ando, Y., & Ohdomari, I. (2000). Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching. Applied Surface Science. https://doi.org/10.1016/s0169-4332(00)00257-9

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crossref · retrieved 2026-09-26T09:22:01.157Z