Remote plasma-assisted nitridation (RPN): applications to Zr and Hf silicate alloys and Al2O3

Chris Hinkle, Gerry Lucovsky

Open source

DOI: 10.1016/s0169-4332(03)00499-9
Published: 2003-06
Container: Applied Surface Science
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0169-4332-03-00499-9,
  title = {Remote plasma-assisted nitridation (RPN): applications to Zr and Hf silicate alloys and Al2O3},
  author = {Chris Hinkle and Gerry Lucovsky},
  year = {2003},
  journal = {Applied Surface Science},
  doi = {10.1016/s0169-4332(03)00499-9},
  url = {https://doi.org/10.1016/s0169-4332(03)00499-9}
}

RIS

TY  - JOUR
TI  - Remote plasma-assisted nitridation (RPN): applications to Zr and Hf silicate alloys and Al2O3
AU  - Chris Hinkle
AU  - Gerry Lucovsky
PY  - 2003
JO  - Applied Surface Science
DO  - 10.1016/s0169-4332(03)00499-9
UR  - https://doi.org/10.1016/s0169-4332(03)00499-9
ER  -

APA

Hinkle, C., & Lucovsky, G. (2003). Remote plasma-assisted nitridation (RPN): applications to Zr and Hf silicate alloys and Al2O3. Applied Surface Science. https://doi.org/10.1016/s0169-4332(03)00499-9

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crossref · retrieved 2026-09-25T20:47:34.583Z