Precise microfabrication of wide band gap semiconductors (SiC and GaN) by VUV–UV multiwavelength laser ablation
- DOI
- 10.1016/s0169-4332(97)00744-7
- Published
- 1998-05
- Container
- Applied Surface Science
- Publisher
- Elsevier BV
- Open access
- unknown
Credibility signals
uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
Show all credibility signals
- supportingDOI registered: A matching record was returned by Crossref.
- supportingDOI resolves: A matching record was returned by Crossref.
- not scoredDirectory of Open Access Journals: No matching DOAJ record was present in this response. No allow-list match; this is not evidence of low credibility.
- not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made.
- not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made.
- not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made.
- not scoredROR affiliation: Not checked or no result supplied; no credibility inference made.
- not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete.
- not scoredOpen access status: Not checked or no result supplied; no credibility inference made.
- not scoredPublication license: Not checked or no result supplied; no credibility inference made.
- not scoredPublication version: A publication version was supplied but is not scored.
- supportingMetadata completeness: All 6 scored descriptive metadata groups are present.
Cite this work
BibTeX
@article{allodium:10.1016/s0169-4332-97-00744-7,
title = {Precise microfabrication of wide band gap semiconductors (SiC and GaN) by VUV–UV multiwavelength laser ablation},
author = {J. Zhang and K. Sugioka and S. Wada and H. Tashiro and K. Toyoda and K. Midorikawa},
year = {1998},
journal = {Applied Surface Science},
doi = {10.1016/s0169-4332(97)00744-7},
url = {https://doi.org/10.1016/s0169-4332(97)00744-7}
}RIS
TY - JOUR TI - Precise microfabrication of wide band gap semiconductors (SiC and GaN) by VUV–UV multiwavelength laser ablation AU - J. Zhang AU - K. Sugioka AU - S. Wada AU - H. Tashiro AU - K. Toyoda AU - K. Midorikawa PY - 1998 JO - Applied Surface Science DO - 10.1016/s0169-4332(97)00744-7 UR - https://doi.org/10.1016/s0169-4332(97)00744-7 ER -
APA
Zhang, J., Sugioka, K., Wada, S., Tashiro, H., Toyoda, K., & Midorikawa, K. (1998). Precise microfabrication of wide band gap semiconductors (SiC and GaN) by VUV–UV multiwavelength laser ablation. Applied Surface Science. https://doi.org/10.1016/s0169-4332(97)00744-7
Source records
- crossref · retrieved 2026-09-25T12:00:32.986Z