Imaging of atomic oxygen in a microwave excited oxygen plasma with two-dimensional optical emission spectroscopy

St. Behle, A. Georg, Y. Yuan, J. Engemann, A. Brockhaus

Open source

DOI: 10.1016/s0257-8972(97)00169-2
Published: 1997-12
Container: Surface and Coatings Technology
Publisher: Elsevier BV
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.1016/s0257-8972-97-00169-2,
  title = {Imaging of atomic oxygen in a microwave excited oxygen plasma with two-dimensional optical emission spectroscopy},
  author = {St. Behle and A. Georg and Y. Yuan and J. Engemann and A. Brockhaus},
  year = {1997},
  journal = {Surface and Coatings Technology},
  doi = {10.1016/s0257-8972(97)00169-2},
  url = {https://doi.org/10.1016/s0257-8972(97)00169-2}
}

RIS

TY  - JOUR
TI  - Imaging of atomic oxygen in a microwave excited oxygen plasma with two-dimensional optical emission spectroscopy
AU  - St. Behle
AU  - A. Georg
AU  - Y. Yuan
AU  - J. Engemann
AU  - A. Brockhaus
PY  - 1997
JO  - Surface and Coatings Technology
DO  - 10.1016/s0257-8972(97)00169-2
UR  - https://doi.org/10.1016/s0257-8972(97)00169-2
ER  -

APA

Behle, S., Georg, A., Yuan, Y., Engemann, J., & Brockhaus, A. (1997). Imaging of atomic oxygen in a microwave excited oxygen plasma with two-dimensional optical emission spectroscopy. Surface and Coatings Technology. https://doi.org/10.1016/s0257-8972(97)00169-2

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crossref · retrieved 2026-09-25T22:51:49.071Z